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The Coverimage
byKiyotaka Wasa, Isaku KannoandHidetoshi Kotera
William Andrew 2012 (657 pages) Citation
ISBN:9781437734836

Providing experimental data with detailed examples and theoretical descriptions, this guide introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.